@InProceedings{LIS219,<br>title = {Electrowetting-on-dielectric Actuation of a Spatial and Angular Manipulation Mems Stage},<br>author = {Daniel J. Preston, Ariel Anders, Banafsheh Barabadi, Evelyn Tio, Yangying Zhu, DingRan Annie Dai, Evelyn N. Wang},<br>year = {2017},<br>url = {http://lis.csail.mit.edu/pubs/preston-mems17.pdf},<br>booktitle = {The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017)},<br>}